PNG
IHDR 5 h sRGB gAMA a pHYs + ,iTXtXML:com.adobe.xmp © Siemens AG 2010, Alle Rechte vorbehalten xmp.did:AF009CFAD102E9118F3498622FB809A4 8 8 8 |0 mIDATx^wfuFzodyC)QtniԢzיo1k?]wzkA=H@ʧޛ7%,~bpMODRJ*URsWTRJ>D \RJ*= \RJ*= \RJ*= \RJ*= \RJ*= \RJ*= \RJ*= \RJ*= \RJ*= \RJ*= \R4}ҾGa*UAsKKKjjj3tRH+U ~ |x"<(0?]â
*U:xdqH,x ǓԔGA"H˯H>G9D.%tz]ҿD+Ut" \__Okiss3=c@5uw6S -`rNMyAك'
? 8_TrP:Lҿ \RI=
Ƃ;$V @|[lVp@gή+&5Viºji&LEKV*T<hlȿ?Oݬc/T7A+UtMw~n>H 0-a. ,@@*jGg 0pG[jk!_ M\7 ّ+ Z@8kjV͏`%.׀LZ9>ЦqH.sďt*}tpJN!VwnZ^Zi M @q#L`0
-Ck.iZL 0`s
iL3+.!t9lǤlnHF.oI\ |{G+UtbSnKwn6Ha?[(e\q,7Qu._AG@BD+ o.^ m1ge'9=qS9_2,w1
t".xV4y?%?gwsJF+UtbΫǏez; $HPLÏ\`IᇫANMK3[jQDu0wJ% gm|cf`X mq۟{Nהm<0p?\MqP>"?_n [i*=U T҉ؘ X
5'- h~6xr|p*Q X@H?1í0 qa ]aB>4%75 lbUi@{P&nD
32/qWyx? CDߓҔ?@!h۠/Eu \RC1x"@a k&T`8 !j t
4n
)@ `EXxHNYJ."Ni:j"x 5S~ FG$,܀t'1V[(lճ;%9=ڮ@5;`)8
wAajaa& /.;